Yintoni i-carbon tetrafluoride?Iluncedo ngantoni?

Yintoni icarbon tetrafluoride?Iluncedo ngantoni?

Ikhabhon tetrafluoride, ekwaziwa ngokuba yi-tetrafluoromethane, ithathwa njengekhompawundi ye-inorganic.Isetyenziswa kwinkqubo yokufakwa kweplasma yeesekethe ezahlukeneyo ezidityanisiweyo, kwaye ikwasetyenziswa njengerhasi yelaser kunye nefriji.Izinzile phantsi kobushushu obuqhelekileyo kunye noxinzelelo, kodwa kuyimfuneko ukuphepha ukudibanisa ne-oxidants enamandla, izinto ezinokutsha okanye ezinokutsha.Ikhabhon tetrafluoride yigesi engatshiyo.Ukuba idibana nokushisa okuphezulu, kuya kubangela ukuba uxinzelelo lwangaphakathi lwesitya lunyuke, kwaye kukho ingozi yokuqhekeka kunye nokuqhuma.Ngokuqhelekileyo inokusebenzisana kuphela ne-reagent yesinyithi ye-ammonia-sodium kwiqondo lokushisa.

Ikhabhon tetrafluoridengoku yeyona rhasi inkulu yeplasma etching esetyenziswa kushishino lwemicroelectronics.Inokusetyenziswa ngokubanzi kwi-etching ye-silicon, i-silicon dioxide, iglasi ye-phosphosilicate kunye nezinye izinto zefilimu ezibhityileyo, ukucoca umphezulu wezixhobo zombane, ukuveliswa kweeseli zelanga, iteknoloji ye-laser, i-gas-phase insulation, ifriji ephantsi yobushushu, i-agents evuzayo, kunye ne-detergents kwimveliso yesekethe eprintiweyo inenani elikhulu lezicelo.


Ixesha lokuposa: Nov-01-2021