Yintoni i-carbon tetrafluoride? Iluncedo ngantoni?

Yintoni icarbon tetrafluoride? Iluncedo ngantoni?

Ikhabhon tetrafluoride, ekwaziwa ngokuba yi-tetrafluoromethane, ithathwa njengekhompawundi ye-inorganic. Isetyenziswa kwinkqubo yokufakwa kweplasma yeesekethe ezahlukeneyo ezidityanisiweyo, kwaye ikwasetyenziswa njengerhasi yelaser kunye nefriji. Izinzile phantsi kobushushu obuqhelekileyo kunye noxinzelelo, kodwa kuyimfuneko ukuphepha ukudibanisa ne-oxidants enamandla, izinto ezinokutsha okanye ezinokutsha. Ikhabhon tetrafluoride yigesi engatshiyo. Ukuba idibana nokushisa okuphezulu, kuya kubangela ukuba uxinzelelo lwangaphakathi lwesitya lunyuke, kwaye kukho ingozi yokuqhekeka kunye nokuqhuma. Ngokuqhelekileyo inokusebenzisana kuphela ne-reagent yesinyithi ye-ammonia-sodium kwiqondo lokushisa.

Ikhabhon tetrafluoridengoku yeyona rhasi inkulu yeplasma etching esetyenziswa kushishino lwemicroelectronics. Inokusetyenziswa ngokubanzi kwi-etching ye-silicon, i-silicon dioxide, iglasi ye-phosphosilicate kunye nezinye izinto zefilimu ezibhityileyo, ukucoca umphezulu wezixhobo zombane, ukuveliswa kweeseli zelanga, iteknoloji ye-laser, i-gas-phase insulation, ifriji ephantsi yobushushu, i-arhente yokufumanisa ukuvuza, kunye ne-detergents kwimveliso yesekethe eprintiweyo inenani elikhulu lezicelo.