Ngale motto engqondweni, siphuhlile phakathi kweyona nto iphambili kwitekhnoloji yeTekhnoloji yeTetran TF4 yexabiso le-CFOn TF4, i-thegi elungileyo, yonke i-TATATION, sonke siphumelele kwi-XXX yeNqaku.
Ngale motto engqondweni, siphuhlise phakathi kweyona nto ibalulekileyo kubuchwephesha, ineendleko, kunye nexabiso lokukhuphisanaI-China CF4 i-CF4 yeGesi kunye nesilinda iRinder, Indawo yethu elungiselelwe kakuhle kunye nolawulo oluphambili oluhle kuwo onke amabakala emveliso esenza ukuba siqinisekise ukoneliseka kwabathengi. Ukuba unomdla nakweyiphi na iimveliso kunye nezisombululo zethu okanye ungathanda ukuxoxa ngomyalelo wesiko, khumbula ukuziva ukhululekile ukunxibelelana nam. Besijonge phambili ekwenzeni ubudlelwane beshishini ophumelelayo kunye nabaxumi abatsha kwihlabathi liphela.
Ukucaciswa | I-99.999% |
Ioksijini + Argon | ≤1ppm |
Initrogen | ≤4 PPM |
Ukufuma (h2o) | ≤3 PPM |
HF | ≤0.1 PPM |
CO | ≤0.1 PPM |
I-co2 | ≤1 PPM |
Sf6 | ≤1 PPM |
I-Halocarbynes | ≤1 PPM |
Ukungcola ngokupheleleyo | ≤10 i-PPM |
I-Carbon Tetrafluoride yi-Hydrocarbon ehamba nge-Hydrocarbon enefomula yekhemikhali ye-chemic4. Kungathathwa njenge-hydrocarbon ye-hydrocarbon, i-hagodied methane, i-perfluorocarbon, okanye njengendawo ye-Inorganic. I-Carbon Tetrafluoride yirhasi engenamibala kunye ne-odolf engenazilwanyana, i-insuble emanzini, inyibilike e-Bedzene kunye ne-chloroform. Izinzile phantsi kobushushu obuqhelekileyo kunye noxinzelelo, zithintele ii-onudants ezizomeleleyo, izixhobo ezinokutsha okanye ezinokutsha. Igesi engeyiyo irhasi, uxinzelelo lwangaphakathi lwesikhongozeli luya kunyuka xa liboniswe kubushushu obuphezulu, kwaye kukho ingozi yokuqhekeka kwaye kuqhume. Kuzinza kakuhle kwaye kungavutha. Kuphela kuphela i-Ammonia-sodium yentsimbi isebenza kubushushu begumbi. I-Carbon Tetrafluoride yirhasi ebangela ifuthe lezityalo. Inokuzinza kakhulu, inokuhlala kwimozulu yexesha elide, kwaye yirhasi eluhlaza enkulu. I-Carbon Tetrafluoride isetyenziswa kwinkqubo ye-plasma etching yesekethe eyahlukeneyo. Ikwasetyenziswa njengegesi yase-laser, kwaye isetyenziswa kwiifriji zeqondo lobushushu, izinyibilikisi, izixhobo zokuthambisa, kunye nokuphola kwezixhobo ze-infrared. Yeyona irhasi ye-plasma esebenzisa igesi ye-radelics kwishishini le-microelectronic. Ngumxube we-tetrafluodhane-gesi gesi yegesi kunye ne-tetrafluoromethane igesi kunye neoksijini ephezulu. Ingasetyenziswa ngokubanzi kwiSilicon, i-Silicon Dioxeide, Silicon Nitride, kunye ne-phosphosilicilicate iglasi. Ukuthathwa kwezinto ezinqabileyo ezifana ne-tungsten kwaye i-tungsten isetyenziswa ngokubanzi ekucoceni izixhobo ze-elektroniki, i-Solar yeSeli, itekhnoloji ye-Solar, iteknoloji yokuKhangela kweqondo lobushushu, kunye ne-orgent kwimveliso yesekethe eprintiweyo. Isetyenziswe njengeranti yeqondo lobushushu kunye ne-plasma yome itekhnoloji ye-etching ye-etching yesekethe. Amanyathelo okhuseleko lokugcina: Ivenkile kwindawo epholileyo, epholileyo engafunekiyo yegesi. Hlala kude nomlilo nobushushu. Iqondo lokugcina le-GORG alifanele lidlule kwi-30 ° C. Ifanele igcinwe ngokwahlukeneyo ukusuka ngokulula (enokutsha) i-accials kunye nee-oxidants, kwaye zithintele ukugcinwa okuxubeneyo. Indawo yokugcina kufuneka ixhotywe ngezixhobo zokunyanga ezingxamisekileyo.
① ifriji:
I-Tetrafluoromethane ngamanye amaxesha isetyenziswa njengefriji yeqondo lobushushu.
I-ETHIT:
Isetyenziselwa ukwena i-Microficriction yedwa okanye ngokudibeneyo ngeoksijini njenge-plasma i-esiricon, i-silicon dioksi, kunye nesilicon nitride.
Imveliso | I-Carbon Tetrafluoride CF4 | ||
Ubungakanani bephakeji | I-40tr cylinder | I-50ltr cylinder | |
Ukuzalisa ubunzima bomnatha / cyl | I-30kgs | 38kgs | |
I-Qty ilayishwe kwi-20'Container | Ii-cyls ezingama-250 | Ii-cyls ezingama-250 | |
Iyonke ubunzima | 7.5 Iitoni | Iitoni ezi-9.5 | |
Isilinda ubunzima | I-50kgs | I-55kgs | |
Ivalve | I-CGA 580 |
Ukucoceka ukucoceka, indawo yamva;
Umvelisi wesitifiketi se-②iso;
Ukuhanjiswa;
Inkqubo yohlalutyo lwe-④on-line kulawulo oluphawuleleyo kuwo onke amanyathelo;
Imfuneko ye-⑤highy kunye nenkqubo yokulinganisa yokuphatha isilinda ngaphambi kokugcwalisa;Ngale motto engqondweni, siphuhlile phakathi kweyona nto iphambili kwitekhnoloji yeTekhnoloji yeTetran TF4 yexabiso le-CFOn TF4, i-thegi elungileyo, yonke i-TATATION, sonke siphumelele kwi-XXX yeNqaku.
Ixabiso elicatshuliweyoI-China CF4 i-CF4 yeGesi kunye nesilinda iRinder, Indawo yethu elungiselelwe kakuhle kunye nolawulo oluphambili oluhle kuwo onke amabakala emveliso esenza ukuba siqinisekise ukoneliseka kwabathengi. Ukuba unomdla nakweyiphi na iimveliso kunye nezisombululo zethu okanye ungathanda ukuxoxa ngomyalelo wesiko, khumbula ukuziva ukhululekile ukunxibelelana nam. Besijonge phambili ekwenzeni ubudlelwane beshishini ophumelelayo kunye nabaxumi abatsha kwihlabathi liphela.