Itekhnoloji yokugrumba okomileyo yenye yeenkqubo eziphambili. Igesi yokugrumba okomileyo yinto ebalulekileyo ekuvelisweni kwee-semiconductor kwaye ngumthombo obalulekileyo wegesi yokugrumba i-plasma. Ukusebenza kwayo kuchaphazela ngokuthe ngqo umgangatho kunye nokusebenza kwemveliso yokugqibela. Eli nqaku labelana kakhulu ngeentlobo zeegesi zokugrumba ezisetyenziswa rhoqo kwinkqubo yokugrumba okomileyo.
Iigesi ezisekelwe kwi-fluorine: ezifanai-carbon tetrafluoride (CF4), i-hexafluoroethane (C2F6), i-trifluoromethane (CHF3) kunye ne-perfluoropropane (C3F8). Ezi gesi zinokuvelisa i-fluoride eguquguqukayo ngempumelelo xa ziqhekeza ii-silicon kunye nee-silicon compounds, ngaloo ndlela ziphumeza ukususwa kwezinto.
Iigesi ezisekelwe kwiklorini: ezifana neklorini (Cl2),i-boron trichloride (BCl3)kunye ne-silicon tetrachloride (SiCl4). Iigesi ezisekelwe kwi-chlorine zinokubonelela ngee-ion ze-chloride ngexesha lenkqubo yokugrumba, nto leyo enceda ukuphucula izinga lokugrumba kunye nokukhetha.
Iigesi ezisekelwe kwi-bromine: ezifana ne-bromine (Br2) kunye ne-bromine iodide (IBr). Iigesi ezisekelwe kwi-bromine zinokubonelela ngokusebenza ngcono kokugrumba kwiinkqubo ezithile zokugrumba, ingakumbi xa kugrumba izinto eziqinileyo ezifana ne-silicon carbide.
Iigesi ezisekelwe kwiNitrogen kunye neoksijini: ezifana ne-nitrogen trifluoride (NF3) kunye neoksijini (O2). Ezi gesi zihlala zisetyenziselwa ukulungisa iimeko zokusabela kwinkqubo yokugrumba ukuphucula ukukhetha kunye nolwalathiso lokugrumba.
Ezi gesi zifezekisa ukugrumba ngokuchanekileyo komphezulu wezinto ngokudibanisa ukutshiza ngokwasemzimbeni kunye neempendulo zeekhemikhali ngexesha lokugrumba ngeplasma. Ukukhethwa kwegesi yokugrumba kuxhomekeke kuhlobo lwezinto eziza kugrumba, iimfuno zokukhetha zokugrumba, kunye nesantya sokugrumba esifunekayo.
Ixesha leposi: Feb-08-2025
