Electroniciigesi ezikhethekileyoziyinxalenye ebalulekileyo yeegesi ezikhethekileyo. Bangena phantse kulo lonke ikhonkco lokuvelisa i-semiconductor kwaye zizinto eziyimfuneko ekuveliseni amashishini e-elektroniki anje ngeesekethe ezidityanisiweyo ezinkulu kakhulu, izixhobo zokubonisa iipaneli ezisicaba, kunye neeseli zelanga.

Kwitekhnoloji ye-semiconductor, iigesi ezine-fluorine zisetyenziswa kakhulu. Okwangoku, kwimarike yegesi ye-elektroniki yehlabathi, i-fluorine-equlethe i-electronic gases i-akhawunti malunga ne-30% yetotali. I-fluorine-equkethe iigesi ze-elektroniki ziyinxalenye ebalulekileyo yeegesi ezikhethekileyo ze-elektroniki kwinkalo yezixhobo zolwazi lwe-elektroniki. Zisetyenziswa kakhulu njengee-agent zokucoca kunye ne-etching agents, kwaye zingasetyenziselwa njenge-dopants, izinto zokwenza ifilimu, njl. Kule nqaku, umbhali uya kukuthatha ukuba uqonde iigesi eziqhelekileyo ezine-fluorine.

Ezi zilandelayo zisetyenziswa ngokuqhelekileyo iigesi ezinefluorine

I-Nitrogen trifluoride (NF3): Irhasi esetyenziselwa ukucoca kunye nokususa iidiphozithi, idla ngokusetyenziselwa ukucoca amagumbi okusabela kunye nomphezulu wezixhobo.

I-Sulfur hexafluoride (SF6): I-agent ye-fluorinating esetyenziswa kwiinkqubo zokubeka i-oxide kunye negesi ekhuselayo yokuzalisa i-insulating media.

IHydrogen fluoride (HF): Isetyenziselwa ukususa iioksidi kumphezulu wesilicon kunye ne-etchant yokufaka isilicon kunye nezinye izinto.

I-Nitrogen fluoride (NF): Isetyenziselwa ukuthunga izinto ezifana ne-silicon nitride (SiN) kunye ne-aluminium nitride (AlN).

I-Trifluoromethane (CHF3) kunyeitetrafluoromethane (CF4): Isetyenziselwa etch imathiriyeli yefluoride efana nesilicon fluoride kunye ne-aluminium fluoride.

Nangona kunjalo, iigesi ezinefluorine zineengozi ezithile, kubandakanya ubutyhefu, ukubola, kunye nokutsha.

Ubutyhefu

Ezinye iigesi ezinefluorine ziyityhefu, njengehydrogen fluoride (HF), umphunga wayo ucaphukisa kakhulu ulusu nakwindlela yokuphefumla kwaye unobungozi kwimpilo yabantu.

Ukonakala

IHydrogen fluoride kunye nezinye iifluoride zenza umhlwa kakhulu kwaye zinokubangela umonakalo omkhulu eluswini, emehlweni nakwindlela yokuphefumla.

Ukutsha

Ezinye iifluoride ziyatsha kwaye zidibana neoksijini okanye amanzi emoyeni ukukhupha ubushushu obugqithisileyo kunye neegesi eziyityhefu, ezinokubangela umlilo okanye ugqabhuko-dubulo.

Ingozi yoxinzelelo oluphezulu

Ezinye iigesi zefluorinated ziqhuma phantsi koxinzelelo oluphezulu kwaye zifuna ukhathalelo olulodwa xa zisetyenziswa kwaye zigcinwe.

Impembelelo kokusingqongileyo

Iirhasi ezine-fluorine zinobomi obuphezulu be-atmospheric kunye nemilinganiselo ye-GWP, enefuthe elitshabalalisayo kwi-ozone ye-atmospheric kwaye enokubangela ukufudumala kwehlabathi kunye nongcoliseko lokusingqongileyo.

Ukusetyenziswa kweegesi kwiindawo ezivelayo ezifana ne-electronics kuyaqhubeka nokunzulu, kuzisa inani elikhulu leemfuno zegesi zamashishini. Ngokusekwe kwisixa esikhulu somthamo omtsha wemveliso yamacandelo amakhulu e-elektroniki anje nge-semiconductors kunye neepaneli zokubonisa kwilizwe laseTshayina kule minyaka imbalwa izayo, kunye nemfuno eyomeleleyo yokungeniswa endaweni yemathiriyeli yeekhemikhali ze-elektroniki, ishishini legesi ye-elektroniki lasekhaya liya kungenisa. izinga lokukhula eliphezulu.