Ukusetyenziswa kwe-tungsten hexafluoride (WF6)

I-Tungsten hexafluoride (WF6) ifakwe kumphezulu we-wafer ngokusebenzisa inkqubo ye-CVD, igcwalisa i-metal interconnection trenches, kwaye yenze i-metal interconnection phakathi kweeleya.

Makhe sithethe ngeplasma kuqala. I-Plasma luhlobo lomcimbi owenziwe ikakhulu ngee-electron zasimahla kunye neeoni ezihlawuliswayo. Ikho ngokubanzi kwindalo iphela kwaye isoloko igqalwa njengemeko yesine yezinto. Ibizwa ngokuba yi-plasma state, ekwabizwa ngokuba yi "Plasma". I-Plasma ine-conductivity ephezulu yombane kwaye inefuthe eliqinileyo lokudibanisa kunye ne-electromagnetic field. Yirhasi ene-ionized, eyenziwe ngee-electron, i-ion, i-radicals yamahhala, amasuntswana angathathi hlangothi kunye neefotoni. I-plasma ngokwayo ingumxube ongathathi hlangothi wombane oqukethe amasuntswana asebenzayo ngokwasemzimbeni kunye neekhemikhali.

Inkcazo ecacileyo kukuba phantsi kwesenzo samandla aphezulu, i-molecule iya kunqoba i-van der Waals force, i-chemical bond force kunye ne-Coulomb force, kwaye ibonise uhlobo lombane ongathathi hlangothi ngokubanzi. Ngexesha elifanayo, amandla aphezulu anikezelwa ngaphandle anqobe amandla amathathu angentla. Umsebenzi, ii-electron kunye nee-ion zinikeza i-free state, enokuthi isetyenziswe ngokufanelekileyo phantsi kwe-modulation ye-magnetic field, njengenkqubo ye-semiconductor etching, inkqubo ye-CVD, i-PVD kunye nenkqubo ye-IMP.

Yintoni amandla aphezulu? Ngokwethiyori, zombini ubushushu obuphezulu kunye nobushushu obuphezulu be-RF bunokusetyenziswa. Ngokuqhelekileyo, ubushushu obuphezulu buphantse bufikeleleke. Le mfuneko yobushushu iphezulu kakhulu kwaye inokuba kufutshane nobushushu belanga. Kuyinto engenakwenzeka ukufezekisa kwinkqubo. Ke ngoko, ishishini lihlala lisebenzisa iRF yefrikhwensi ephezulu ukuyifezekisa. I-Plasma RF inokufikelela phezulu njenge-13MHz +.

I-Tungsten hexafluoride i-plasmaized phantsi kwesenzo sentsimi yombane, kwaye emva koko umphunga-ufakwe yintsimi yamagnetic. Ii-athom zifana neentsiba zerhanisi zasebusika kwaye ziwela emhlabeni phantsi kwentshukumo yomxhuzulane. Kancinci, iiathom ze-W zifakwa kwimingxunya, kwaye ekugqibeleni zizaliswe ngokupheleleyo kwimingxunya ukwenza uqhagamshelo lwesinyithi. Ukongeza ekufakeni iiathom zeW kwimingxunya, ingaba nazo ziya kufakwa kumphezulu weWafer? Ewe, ngokuqinisekileyo. Ngokuqhelekileyo, ungasebenzisa inkqubo ye-W-CMP, into esiyibiza ngokuba yinkqubo yokusila ngomatshini ukususa. Kuyafana nokusebenzisa umtshayelo ukutshayela umgangatho emva kwekhephu elinzima. Ikhephu elisemhlabeni liyakhukuliswa, kodwa ikhephu elisemngxunyeni liya kuhlala lihleli. Phantsi, phantse ngokufanayo.