Ukusetyenziswa kwe-tungsten hexafluoride (WF6)

I-Tungsten hexafluoride (WF6) ifakwa phezu komphezulu we-wafer ngenkqubo ye-CVD, igcwalisa imisele yokudibanisa isinyithi, kwaye yenze unxibelelwano lwesinyithi phakathi kweengqimba.

Masithethe ngeplasma kuqala. Iplasma luhlobo lwento equlunqwe kakhulu zii-electron ezikhululekileyo kunye nee-ion ezitshajiweyo. Ikho ngokubanzi kwindalo iphela kwaye idla ngokuthathwa njengemeko yesine yento. Ibizwa ngokuba yi-plasma state, ekwabizwa ngokuba yi-"Plasma". Iplasma inombane ophezulu kwaye inefuthe elinamandla lokudibanisa ne-electromagnetic field. Yigesi eyinxalenye ye-ionized, eyenziwe zii-electron, ii-ion, ii-free radicals, ii-particles ezingathathi hlangothi, kunye nee-photons. Iplasma ngokwayo ngumxube ongathathi hlangothi wombane oqulethe ii-particles ezisebenzayo ngokwasemzimbeni nangokweekhemikhali.

Ingcaciso ecacileyo kukuba phantsi kwesenzo samandla aphezulu, imolekyuli iya koyisa amandla e-van der Waals, amandla e-chemical bond kunye namandla e-Coulomb, kwaye iveze uhlobo lombane ongathathi cala iyonke. Kwangaxeshanye, amandla aphezulu anikwa ngaphandle ayoyisa la mandla mathathu angasentla. Umsebenzi, ii-electron kunye nee-ion ziveza imeko ekhululekileyo, engasetyenziswa ngokwenziwa phantsi kokuguqulwa kwentsimi yemagnethi, njengenkqubo yokugrumba ye-semiconductor, inkqubo ye-CVD, inkqubo ye-PVD kunye ne-IMP.

Yintoni amandla aphezulu? Ngokwethiyori, zombini ii-RF zobushushu obuphezulu kunye nee-frequency eziphezulu zingasetyenziswa. Ngokubanzi, ubushushu obuphezulu abunakwenzeka ukufezekiswa. Le mfuneko yobushushu iphezulu kakhulu kwaye isenokuba kufutshane nobushushu belanga. Ngokusisiseko akunakwenzeka ukufezekiswa kule nkqubo. Ke ngoko, eli shishini lidla ngokusebenzisa ii-RF zobushushu obuphezulu ukuze lifezekiswe. I-Plasma RF inokufikelela kwi-13MHz+.

I-Tungsten hexafluoride ifakwa kwiplasma phantsi kwesenzo sombane, ize emva koko ibekwe ngumphunga yimagnethi. Iiathom ze-W zifana neentsiba zehashe lasebusika kwaye ziwela emhlabeni phantsi kwesenzo somxhuzulane. Kancinci kancinci, iiathom ze-W zifakwa kwimingxunya edlulayo, kwaye ekugqibeleni zizaliswe zigcwele ngemingxunya ukwenza uqhagamshelo lwesinyithi. Ukongeza ekubekeni iiathom ze-W kwimingxunya edlulayo, ngaba ziya kufakwa naphezu komphezulu weWafer? Ewe, ngokuqinisekileyo. Ngokubanzi, ungasebenzisa inkqubo ye-W-CMP, esikubiza ngokuba yinkqubo yokugaya ngoomatshini ukuyisusa. Kufana nokusebenzisa umtshayelo ukutshayela umgangatho emva kwekhephu elikhulu. Ikhephu elisemhlabeni liyatshayelwa, kodwa ikhephu elisemngxunyeni osemhlabeni liya kuhlala. Phantsi, phantse lifana.