Ukusetyenziswa kwe-tungsten hexisluoride (wf6)

I-tungsten hexisluoride (WF6) ifakwe kumphezulu we-wafed ngenkqubo ye-CVD, egcwalisa imithi ye-iron kunye nokwakha unxibelelwano lwensimbi phakathi kweendlela.

Makhe sithethe ngePlasma kuqala. Iplasma yindlela yoMcimbi oqokelelwe kwii-elektroni zasimahla kunye nee-ions. Ikhona ngokubanzi kwindalo iphela kwaye ihlala ithathwa njengemeko yesine yezinto. Ibizwa ngokuba yiPlasma State, kwakwabizwa ngokuba yi "Plasma". I-Plasma ineendlela eziphakamileyo zombane kwaye inefuthe elomeleleyo lemigangatho ye-elektromagnetic. Yigesi engqonge irhasi, equlathe ii-elektroni, i-ion, i-radicals yasimahla, amasuntswana angathathi hlangothi, kunye neefoto. I-Plasma ngokwayo ingumxube wombane oqukethe amasuntswana amnyama kunye nemichiza.

Inkcazo ethe tye yeyokuba phantsi kwesenzo samandla aphezulu, imolekyuli iya koyisa iVer Der, i-Chemical Force And Forces And Formunity, kwaye ihambisa uhlobo lombane ongathathi cala. Kwangelo xesha, amandla aphezulu adluliselwa ngaphandle koloyisa la mandla amathathu angasentla. Umsebenzi, ii-elektroni kunye nee-Ions zihambisa i-free State, enokusetyenziswa ngobuchule phantsi kwemodyuli yentsimi yemagnelo, njengenkqubo yokuphuma kwe-semicondcuction, inkqubo ye-CVD, inkqubo ye-CVD, inkqubo ye-CVD, inkqubo ye-CVD.

Yintoni amandla ephezulu? Kwithiyori, omabini amaqondo obushushu aphezulu kunye ne-RF ephezulu ye-RF inokusetyenziswa. Ngokubanzi, amaqondo obushushu aphezulu aphantse angafezekisi. Le mfuno yobushushu iphezulu kakhulu kwaye isenokusondela kubushushu belanga. Kuyinto engenakwenzeka ukuba iphumelele kwinkqubo. Ke ngoko, ishishini lihlala lisebenzisa i-free-freency rf ukuyifezekisa. IPlasma RF inokufikelela phezulu njenge-13mhz.

I-tungsten hexifluoride ifakwe phantsi kwesenzo secandelo lombane, kwaye ke vapor-ifakwe i-magnetic friji. Ii-atom ziyafana kwi-goose yasebusika kwaye iwele emhlabeni phantsi kwesenzo somoya. Ngokuthe ngcembe, ii-athom zifakwe kwimingxunya, kwaye ekugqibeleni zizaliswe zigcwele imingxunya ukwenza iingcebiso zensimbi. Ukongeza ekubekeni ii-atom ze-W kwi-Holes, ngaba baya kufakwa kumphezulu we-wafer? Ewe, ngokuqinisekileyo. Ngokubanzi, unokusebenzisa inkqubo ye-W-CMP, yile nto siyibiza ngokuba yinkqubo yokuhlimela yoomatshini ukususa. Kuyafana nokusebenzisa umtshayelo ukutshayela umgangatho emva kwekhephu elinzima. Ikhephu emhlabeni litshatyalalisiwe, kodwa ikhephu emngxunyeni emhlabeni liza kuhlala. Phantsi, phantse ngokufanayo.