Eyona gesi isetyenziswa kakhulu kwi-elektroniki i-nitrogen trifluoride

I-fluorine eqhelekileyo equlethe iigesi ezikhethekileyo ze-elektroniki ziqukaisulfure hexafluoride (SF6)i-tungsten hexafluoride (WF6),carbon tetrafluoride (CF4), i-trifluoromethane (CHF3), i-nitrogen trifluoride (NF3), i-hexafluoroethane (C2F6) kunye ne-octafluoropropane (C3F8).

Ngophuhliso lwe-nanotechnology kunye nophuhliso olukhulu lweshishini lombane, imfuno yalo iya kwanda imihla ngemihla. I-Nitrogen trifluoride, njengeyona gesi iyimfuneko kunye neyona inkulu isetyenziswa kakhulu kwimveliso kunye nokusetyenzwa kweephaneli kunye ne-semiconductors, inendawo yokuthengisa ebanzi.

Njengohlobo lwegesi ekhethekileyo enefluorine,initrogen trifluoride (NF3)yimveliso yegesi ekhethekileyo yombane enomthamo omkhulu wemarike. Isebenza ngeekhemikhali kwiqondo lobushushu begumbi, iyasebenza ngakumbi kuneoksijini kubushushu obuphezulu, izinzile kunefluorine, kwaye kulula ukuyiphatha. I-Nitrogen trifluoride isetyenziswa kakhulu njenge-plasma etching gas kunye ne-reaction agent yokucoca igumbi, kwaye ifanelekile kwimihlaba yokuvelisa i-semiconductor chips, i-flat panel displays, i-optical fibers, iiseli ze-photovoltaic, njl.

Xa kuthelekiswa nezinye iigesi ze-elektroniki ezinefluorine,initrogen trifluorideineenzuzo zokusabela ngokukhawuleza kunye nokusebenza kakuhle okuphezulu. Ngokukodwa kwi-etching yezinto ezine-silicon ezifana ne-silicon nitride, inezinga eliphezulu lokulinganisa kunye nokukhetha, kungashiyi ntsalela kumphezulu wento egciniweyo. Kwakhona i-arhente yokucoca kakuhle kakhulu kwaye ayinakho ukungcola phezulu, enokuthi ihlangabezane neemfuno zenkqubo yokucubungula.