Esona sixa sikhulu segesi ye-elektroniki - i-nitrogen trifluoride nf3

Imveliso yelizwe lethu kunye nemveliso yephaneli igcina inqanaba eliphezulu lokuchuma. I-nitrogen trifluoride, njengeyona gesi ye-elektroniki ebonakalayo neyenzelwe i-elektroniki ye-elektroniki kwimveliso kunye nokulungiswa kweephaneli kunye ne-semicondyus, indawo ebanzi yentengiso.

I-fluorine esetyenziselwa i-fluorine eneegesi ezikhethekileyo ze-elektroniki zibandakanyaI-Sulfuur Hexusluoride (SF6), i-tungsten hexluoride (wf6),I-Carbon Tetrafluoride (CF4), I-Trifluomethane (CHF3), i-witrogen trifluoride (NF3), i-hexifluoroethane (C2F6) kunye ne-OC3F8). I-Nitrogen Trifluoride (NF3) isetyenziswa ikakhulu njenge-fluorine yomthombo we-hydrogen fluoride-fluoride irhasi ephezulu ye-fluoride. Inxalenye esebenzayo (malunga ne-25%) yokuphendula phakathi kwe-H2-O2 kunye ne-F2 kwaye i-F2 ikhutshwe yimitha ye-laser, i-HF-yeLasers yeyona ndawo ithembisayo phakathi kwabaphathi beekhemikhali.

I-nitrogen trifluoride yirhasi egqwesileyo yePlasma ethambileyo kumzi mveliso we-microhelectroni. I-ethating silicon kunye ne-siticon nitride, i-nitrogen trifluoride inemilinganiselo ephezulu yokufumana kwaye ukhetha kune-carbon ttibon titrafluoride kunye nomxube we-carbon titrafluoride kunye neoksijini, kwaye ayinayo ingcoliseko kumphezulu. Ingakumbi ekuphumeni kwezixhobo zesekethe ezidityanisiweyo ezinobunzima obungaphantsi kwe-1.5um, i-nitrogen trifluoride inereyithi efanelekileyo ye-etching kwaye ukukhetha, kwaye ikwangayi-arhente efanelekileyo. Ngokuphuhliswa kwe-nanotechnology kunye nophuhliso olukhulu kushishino lwe-elektroniki, ibango layo liya kunyuka imihla ngemihla.

Njengohlobo lwe-fluorine-enerhasi ekhethekileyo, i-nitrogen trifluoride (NF3) yeyona mveliso inkulu yerhasi ekhethekileyo kwintengiso. I-Intert ye-chemikhali kubushushu begumbi, isebenza ngakumbi kuneoksijini, izinzile ngakumbi kune-fluorine, kwaye kulula ukuziphatha kwiqondo lokushisa eliphezulu.

I-nitrogen trifluoride isetyenziswa ikakhulu njenge-plasma ethambeze igesi kunye ne-Arhente yokuCoca iRhafu, ilungele imihlaba yemveliso efana ne-semiconductol chips, ipaneli eflethi, iifolda ezihamba ngeefoto, njlvoltaic, njlvoltaic, njlvoltaic, njlvoltaic, njlvoltaic.

Xa kuthelekiswa nezinye iigesi ze-elektroniki eziqulathiweyo, i-nitrogen trifluraide inezibonelelo zokusabela ngokusaza kunye nokukhetha, kwaye ikwangummeli we-elchicon enee-sitride, kwaye ingeyiyo iarhente enomhlaba, kwaye ingazingcoliseka kumphezulu kwaye ungazifezekisa iimfuno ze Inkqubo yokulungisa.