Isixa Esikhulu Segesi Ekhethekileyo Ye-elektroniki – I-Nitrogen Trifluoride NF3

Ishishini lee-semiconductor kunye neshishini leephaneli zelizwe lethu zigcina umgangatho ophezulu wokuchuma. I-nitrogen trifluoride, njengegesi ekhethekileyo ye-elektroniki eyimfuneko kwaye inkulu kakhulu ekuvelisweni nasekucutshungulweni kweephaneli kunye nee-semiconductors, inendawo enkulu yemarike.

Iigesi ezikhethekileyo ze-elektroniki eziqulethe i-fluorine ezisetyenziswa rhoqo ziqukai-hexafluoride yesalfure (SF6)i-tungsten hexafluoride (WF6),i-carbon tetrafluoride (CF4), i-trifluoromethane (CHF3), i-nitrogen trifluoride (NF3), i-hexafluoroethane (C2F6) kunye ne-octafluoropropane (C3F8). I-nitrogen trifluoride (NF3) isetyenziswa kakhulu njengomthombo we-fluorine kwi-hydrogen fluoride-fluoride gas high-energy chemical lasers. Inxalenye esebenzayo (malunga ne-25%) yamandla okusabela phakathi kwe-H2-O2 kunye ne-F2 inokukhutshwa yi-laser radiation, ngoko ke ii-HF-OF lasers zezona lasers zithembisayo phakathi kwee-chemical lasers.

I-nitrogen trifluoride yigesi ebalaseleyo yokugrumba iplasma kwishishini le-microelectronics. Kwi-silicon egrumbayo kunye ne-silicon nitride, i-nitrogen trifluoride inesantya esiphezulu sokugrumba kunye nokukhetha kune-carbon tetrafluoride kunye nomxube we-carbon tetrafluoride kunye ne-oxygen, kwaye ayinangcoliseko kumphezulu. Ingakumbi ekugrumbeni kwezinto zesekethe ezidibeneyo ezinobukhulu obungaphantsi kwe-1.5um, i-nitrogen trifluoride inesantya esiphezulu sokugrumba kunye nokukhetha, ingashiyi ntsalela kumphezulu wento egrumbayo, kwaye ikwayiarhente yokucoca elungileyo kakhulu. Ngophuhliso lwe-nanotechnology kunye nophuhliso olukhulu lweshishini le-elektroniki, imfuno yayo iya kwanda imihla ngemihla.

Njengohlobo lwegesi ekhethekileyo equlethe i-fluorine, i-nitrogen trifluoride (NF3) yeyona mveliso inkulu yegesi ekhethekileyo ye-elektroniki kwimarike. Ayisebenzi ngokweekhemikhali kubushushu begumbi, isebenza ngakumbi kuneoksijini, izinzile ngakumbi kune-fluorine, kwaye kulula ukuyiphatha kubushushu obuphezulu.

I-nitrogen trifluoride isetyenziswa kakhulu njengegesi yokutshiza i-plasma kunye ne-arhente yokucoca igumbi lokusabela, ifanelekile kwiindawo zokuvelisa ezifana neetships ze-semiconductor, ii-flat panel displays, ii-optical fibers, ii-photovoltaic cells, njl.njl.

Xa kuthelekiswa nezinye iigesi ze-elektroniki ezine-fluorine, i-nitrogen trifluoride ineengenelo zokusabela ngokukhawuleza kunye nokusebenza kakuhle, ingakumbi ekukrolweni kwezinto ezine-silicon ezifana ne-silicon nitride, inesantya esiphezulu sokukrolwa kunye nokukhetha, ingashiyi ntsalela kumphezulu wento ekroliweyo, kwaye ikwayiarhente yokucoca elungileyo kakhulu, kwaye ayingcolisi kumphezulu kwaye inokuhlangabezana neemfuno zenkqubo yokucubungula.