Kwinkqubo yokuvelisa ii-semiconductor wafer foundries ezineenkqubo zemveliso eziphambili, kufuneka phantse iintlobo ezingama-50 ezahlukeneyo zeegesi. Iigesi ngokubanzi zahlulwe zibe ziigesi ezinkulu kunyeiigesi ezikhethekileyo.

Ukusetyenziswa kweegesi kwimizi-mveliso ye-microelectronics kunye neye-semiconductor Ukusetyenziswa kweegesi bekusoloko kudlala indima ebalulekileyo kwiinkqubo ze-semiconductor, ingakumbi iinkqubo ze-semiconductor zisetyenziswa kakhulu kwimizi-mveliso eyahlukeneyo. Ukusuka kwi-ULSI, i-TFT-LCD ukuya kushishino lwangoku lwe-micro-electromechanical (MEMS), iinkqubo ze-semiconductor zisetyenziswa njengeenkqubo zokuvelisa imveliso, kubandakanya ukugrumba okomileyo, i-oxidation, ukufakelwa kwe-ion, ukufakwa kwefilimu encinci, njl.

Umzekelo, abantu abaninzi bayazi ukuba iitships zenziwe ngesanti, kodwa xa bejonga yonke inkqubo yokwenziwa kweetships, kufuneka izinto ezingaphezulu, ezifana ne-photoresist, i-polishing liquid, izinto ezijoliswe kuzo, igesi ekhethekileyo, njl.njl. azinakufuneka. Ukupakisha ngasemva kufuna ii-substrates, ii-interposers, iifreyimu ze-lead, izinto zokubopha, njl.njl. zezinto ezahlukeneyo. Iigesi ezikhethekileyo ze-elektroniki zezona zinto zimbini ngobukhulu kwiindleko zokwenziwa kwee-semiconductor emva kwee-silicon wafers, zilandelwa ziimaski kunye nee-photoresists.

Ubunyulu begesi bunempembelelo enkulu ekusebenzeni kwecandelo kunye nemveliso, kwaye ukhuseleko lokunikezelwa kwegesi lunxulumene nempilo yabasebenzi kunye nokhuseleko lokusebenza kwefektri. Kutheni ubunyulu begesi bunempembelelo enkulu kangaka kumgca wenkqubo kunye nabasebenzi? Oku akukokubaxa, kodwa kumiselwa ziimpawu eziyingozi zegesi ngokwayo.

Ukwahlulwa kweegesi eziqhelekileyo kushishino lwe-semiconductor

Igesi eqhelekileyo

Igesi eqhelekileyo ikwabizwa ngokuba yigesi enkulu: ibhekisa kwigesi yemizi-mveliso eneemfuno zobumsulwa ezingaphantsi kwe-5N kunye nomthamo omkhulu wemveliso kunye nokuthengisa. Ingahlulwahlulwa ibe yigesi yokwahlula umoya kunye negesi yokwenziwa ngokweendlela ezahlukeneyo zokulungiselela. I-Hydrogen (H2), i-nitrogen (N2), i-oxygen (O2), i-argon (A2), njl.njl.;

Igesi ekhethekileyo

Igesi ekhethekileyo ibhekisa kwigesi yemizi-mveliso esetyenziswa kwiindawo ezithile kwaye ineemfuno ezikhethekileyo zobumsulwa, iintlobo ngeentlobo, kunye neempawu. NgokuyintlokoI-SiH4, PH3, B2H6, A8H3,I-HCL, CF4,NH3, POCL3, SIH2CL2, SIHCL3,NH3, I-BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF6… kwaye nangokunjalo.

Iintlobo zeegesi zeSpical

Iindidi zeegesi ezikhethekileyo: ezirhabaxa, ezinobuthi, ezinokutsha, ezixhasa ukutsha, ezingasebenziyo, njl.
Iigesi ze-semiconductor ezisetyenziswa rhoqo zihlelwa ngolu hlobo lulandelayo:
(i) Iyakonakalisa/inetyhefu:I-HCl、BF3、WF6、HBr、SiH2Cl2、NH3、PH3、Cl2、BCl3…
(ii) Inokutsha: H2,CH4、I-SiH4,PH3,AsH3,SiH2Cl2,B2H6,CH2F2,CH3F,CO...
(iii) Into evuthayo: O2、Cl2、N2O、NF3…
(iv) I-Animal: N2,CF4、C2F6、C4F8、SF6CO2,Ne、Kr、 Yena…

Kwinkqubo yokwenziwa kweetshiphu ze-semiconductor, malunga neentlobo ezingama-50 ezahlukeneyo zeegesi ezikhethekileyo (ezibizwa ngokuba ziigesi ezikhethekileyo) zisetyenziswa kwi-oxidation, diffusion, deposition, etching, injection, photolithography kunye nezinye iinkqubo, kwaye amanyathelo enkqubo iyonke adlula amakhulu. Umzekelo, i-PH3 kunye ne-AsH3 zisetyenziswa njengemithombo ye-phosphorus kunye ne-arsenic kwinkqubo yokufakelwa kwe-ion, iigesi ezisekelwe kwi-F CF4, CHF3, SF6 kunye neegesi ze-halogen CI2, BCI3, HBr zisetyenziswa rhoqo kwinkqubo yokusika, i-SiH4, NH3, N2O kwinkqubo yefilimu yokubeka, i-F2/Kr/Ne, Kr/Ne kwinkqubo ye-photolithography.

Ukusuka kwezi nkalo zingasentla, sinokuqonda ukuba iigesi ezininzi ze-semiconductor ziyingozi emzimbeni womntu. Ngokukodwa, ezinye zeegesi, ezifana ne-SiH4, ziyazivuthela. Logama nje zivuza, ziya kusabela ngamandla xa ioksijini isemoyeni kwaye ziqale ukutsha; kwaye i-ASH3 inetyhefu kakhulu. Nakuphi na ukuvuza okuncinci kunokubangela ingozi kubomi babantu, ngoko ke iimfuno zokhuseleko loyilo lwenkqubo yolawulo lokusetyenziswa kweegesi ezikhethekileyo ziphezulu kakhulu.

Ii-semiconductors zifuna iigesi ezicocekileyo kakhulu ukuze zibe "namadigri amathathu"

Ubumsulwa begesi

Umxholo womoya ongcolileyo kwigesi udla ngokubonakaliswa njengepesenti yobumsulwa begesi, njenge-99.9999%. Ngokubanzi, imfuneko yobumsulwa beegesi ezikhethekileyo ze-elektroniki ifikelela kwi-5N-6N, kwaye ibonakaliswa ngumlinganiselo wevolumu yomxholo womoya ongcolileyo we-ppm (inxalenye ngesigidi), i-ppb (inxalenye ngebhiliyoni), kunye ne-ppt (inxalenye ngetriliyoni). Intsimi ye-semiconductor ye-elektroniki ineemfuno eziphezulu zobumsulwa kunye nokuzinza komgangatho weegesi ezikhethekileyo, kwaye ubumsulwa beegesi ezikhethekileyo ze-elektroniki ngokubanzi bungaphezulu kwe-6N.

Ukoma

Umthamo wamanzi angaphantsi kwigesi, okanye ubumanzi, uhlala ubonakaliswa kwindawo yokubanda, njenge-atmospheric dew point -70℃.

Ucoceko

Inani lamasuntswana angcolisayo kwigesi, amasuntswana anobukhulu besuntswana obuyi µm, lichazwa ngokwenani lamasuntswana/M3. Kumoya ocinezelweyo, ngokuqhelekileyo libonakaliswa kwi mg/m3 yamasuntswana aqinileyo angenakuphepheka, aquka umxholo weoyile.