I-Semiconductor Gases

Kwinkqubo yokwenziwa kwemveliso ye-semiconductor ye-semiconductor eneenkqubo eziphambili zemveliso, phantse iintlobo ezingama-50 zeegesi ziyafuneka. Iigesi zihlala zahlulwe zaba ziigesi ezininzi kwayeIigesi ezikhethekileyo.

Ukusetyenziswa kweegesi kwii-microelection kunye ne-semicondors Memiconductors ukusetyenziswa kweegesi bekusoloko kudlala indima ebalulekileyo kwiinkqubo ze-semicondcuctor, ngakumbi iinkqubo ze-semiortuctorcuctor zisetyenziswa ngokubanzi kumashishini ahlukeneyo. Ukusuka kwi-ULSI, i-TFT-LCD kwiShishini leMicrosoft ElecCheChabical (iMMS), iinkqubo ze-semicondcuctor zisetyenziswa njengeenkqubo zemveliso zemveliso, kubandakanya i-etching yemveliso, i-oxidation, i-ion yefilimu, njl.

Umzekelo, abantu abaninzi bayazi ukuba ii-chips zenziwe ngentlabathi, kodwa zijonge yonke inkqubo ye-Chip, izixhobo ezingaphezulu, njengefoto, i-polling with, irhasi ekhethekileyo, njl njl. Ukupakisha umva kwakhona kukwafuna amathume, abaphambukeli, izakhelo ezikhokelayo, izixhobo zokubonisa, njl njl. Yezixhobo ezahlukeneyo. Iigesi ezikhethekileyo ze-elektroniki zezona zinto zibalulekileyo ze-Eicondsuctor kwiindleko zemveliso ye-semicondcuctores emva kwe-sefir, ilandelwe ziimaski kunye nabagcini boobani.

Ukucoceka kwegesi kunefuthe lokuthatha isigqibo sentsebenzo kunye nesivuno semveliso, kwaye ukhuseleko lokubonelela ngegesi kunxulumene nempilo yabasebenzi kunye nokukhuseleka komsebenzi. Kutheni ubunyulu begesi bunempembelelo enkulu kumgca wenkqubo kunye nabasebenzi? Le ayisiyonto igqithisileyo, kodwa igqitywe ziimpawu eziyingozi zegesi ngokwayo.

Ukwahlulahlulwa kweegesi eziqhelekileyo kwishishini le-semiconductor

Igesi eqhelekileyo

Igesi eqhelekileyo ikwabizwa ngokuba yigesi enkulu: ibhekisa kwigesi yezamashishini ngemfuno ecocekileyo esezantsi kune-5n kunye nevolumu enkulu kunye nevolumu yokuthengisa kunye nemveliso enkulu. Inokwahlulwa ibe yigesi yokwahlulahlula umoya kunye negesi ye-synthetic ngokweendlela ezahlukeneyo zokulungiselela. I-hydrogen (H2), i-nitrogen (N2), ioksijini (o2), iArgon (A2), njl.;

Irhasi ekhethekileyo

Igesi ekhethekileyo ibhekisa kwigesi yezoshishino esetyenziselwa amasimi athile kwaye ineemfuno ezizodwa zokucoceka, ezahlukeneyo, kunye neepropathi. Ubukhulu becalaI-Sih4, Ph3, B2h6, A8h3,Hcl, CF4,Nh3, Pocl3, Sih2cl2, Sihcl3,Nh3, Bcl3, SIF4, COF3, CO, C2F6, N2O, F2, HF, HF, HRB,Sf6… kwaye nangokunjalo.

Iindidi zeegesi ze-spicial

Iindidi zeegesi ezikhethekileyo: Ukungatyhefiki, kunetyhefu, ukuxhaswa okuxhasayo, i-InErt, njl njl.
I-semiconductor esetyenziswayo ye-semiconductor ihlelwe ngolu hlobo lulandelayo:
(i) ityhefu / inetyhefu:Hcl, Bf3, wf6, hbr, sih2cl2, nh3, ph3, cl2,Bcl3...
(ii) I-HA)Ch4,I-Sih4, Ph3, i-Ash3, Ih2cl2, B2h6, Ch2F2, CH3F, CO ...
(iii) Elisekisiweyo: O2, Cl2, N2O, NF3 ...
(iv) Inert: N2,Cf4, C2F6,I-C4F8,Sf6, Co2,Ne,Kr, ...

Kwinkqubo yemveliso ye-semiconductoration, malunga neentlobo ezingama-50 ezahlukeneyo zegesi ezikhethekileyo (ekubhekiswa kuzo njengegesi ezikhethekileyo) zisetyenziswa kwi-oxidation, i-diffiction, i-enating, kunye nezinye iinkqubo zidlula amakhulu. Umzekelo, i-Ash3 isetyenziswe njenge-phosphorus kunye nemithombo ye-Arsenic kwiNkqubo yokuThengisa ye-IOI, i-FRF3, i-HEH3, i-SFE3, i-SFE3, i-SFE3, i-SFE3, i-HEB3, i-HEB3, i-SFE3, i-HRF3, i-HRF3, i-HRF3, i-HRED / KR / I-KR yenkqubo yefoto.

Kule miba ingentla, sinokuqonda ukuba iigesi ezininzi ze-semicondtuortus ziyingozi emzimbeni womntu. Ngokukodwa, ezinye zeegesi, ezinjengeSih4, ziyazingca. Logama nje bavuza, baya kuphendula ngobunono ngeoksijini emoyeni kwaye baqale ukutshisa; kwaye i-ash3 inetyhefu kakhulu. Nakuphi na ukuvuza okuncinci okuvuzayo kunokubangela ingozi kubomi babantu, ngoko ke iimfuno zokhuseleko lwenkqubo yokulawula inkqubo yokusetyenziswa kweegesi ezikhethekileyo ziphezulu kakhulu.

I-Semicondlads ifuna igesi ePhezulu yokuPhila / i-Gestrees ezintathu "

Ucoceko lwegesi

Umxholo wemozulu yokungena kwirhasi uhlala ubonakaliswa njengepesenti yokucoceka kwerhasi, njenge-99.99%. Ngokubanzi, imfuneko yokucoceka kwezinto ze-elektroniki ifikelela kwi-5n-6N, kwaye ikwabonakaliswa ngumyinge wevolumu ye-PPM yoMxholo we-PPM (Icandelo ngalinye lesigidi), i-PPT ye-trillion nganye). Intsimi ye-elecacondcuctor ye-elektrolondcuctor ineemfuno eziphezulu zokucoceka kunye nokuzinza komgangatho weegesi ezikhethekileyo, kunye nokucoceka kweegesi ezikhethekileyo ze-elektroniki zihlala zikhulu kune-6n.

Ukomisa

Umxholo wokulandela amanzi kwigesi, okanye ubunzi, uhlala ubonakaliswa kwi-Dew Point, njenge-Atmospheric Dew -70 ℃.

Ukucoceka

Inani lamasuntswana angcolisayo kwirhasi, amasuntswana anobukhulu be-μm, abonakaliswa ukuba mangaphi amasuntswana / m3. Ngomoya oxinzelelweyo, ihlala ibonakaliswa kwi-MG / M3 yentsalela eqingqiweyo, ebandakanya umxholo weoyile.


IXESHA LOKUQALA: AUG-06-2024