Kwinkqubo yokwenziwa kwe-semiconductor wafer foundries eneenkqubo zokuvelisa ezikwinqanaba eliphezulu, phantse iintlobo ezingama-50 ezahlukeneyo zeegesi ziyafuneka. Iigesi zihlulwe ngokubanzi zibe ziigesi ezininzi kunyeiigesi ezikhethekileyo.

Ukusetyenziswa kweegesi kwi-microelectronics kunye namashishini e-semiconductor Ukusetyenziswa kweegesi kuye kwahlala kudlala indima ebalulekileyo kwiinkqubo ze-semiconductor, ngokukodwa iinkqubo ze-semiconductor zisetyenziswa ngokubanzi kumashishini ahlukeneyo. Ukusuka kwi-ULSI, i-TFT-LCD ukuya kwi-industry micro-electromechanical (MEMS) yangoku, iinkqubo ze-semiconductor zisetyenziswa njengeenkqubo zokuvelisa imveliso, kubandakanywa i-etching eyomileyo, i-oxidation, i-ion implantation, ukufakwa kwefilimu encinci, njl.

Umzekelo, abantu abaninzi bayazi ukuba iitshiphusi zenziwe ngesanti, kodwa kujongwe kuyo yonke inkqubo yokwenziwa kwe-chip, kufuneka izinto ezininzi ezinje ngefotoresist, ulwelo lokupolisha, izinto ezijoliswe kuzo, igesi ekhethekileyo, njl.njl. Ukupakishwa kwe-back-end kwakhona kufuna i-substrates, i-interposer, iifreyimu ezikhokelayo, izinto ezidibeneyo, njl. zezinto ezahlukeneyo. Iigesi ezikhethekileyo ze-elektroniki zezona zinto zimbini ngobukhulu kwiindleko zokwenziwa kwe-semiconductor emva kwee-wafers ze-silicon, zilandelwa ziimaski kunye ne-photoresists.

Ukucoceka kwegesi kunempembelelo eqinisekileyo ekusebenzeni kwecandelo kunye nemveliso yemveliso, kwaye ukhuseleko lokunikezelwa kwegesi luhambelana nempilo yabasebenzi kunye nokhuseleko lomsebenzi wefektri. Kutheni ukucoceka kwegesi kunempembelelo enkulu kumgca wenkqubo kunye nabasebenzi? Oku akukona ukugqithisa, kodwa kunqunywe yimpawu ezinobungozi zegesi ngokwayo.

Ukuhlelwa kweegesi eziqhelekileyo kwishishini le-semiconductor

IGesi eqhelekileyo

Igesi eqhelekileyo ikwabizwa ngokuba yigesi eninzi: ibhekisa kwigesi yeshishini enemfuno yococeko engaphantsi kwe-5N kunye nomthamo omkhulu wemveliso kunye nokuthengisa. Inokwahlulwa ibe yigesi yokwahlula umoya kunye negesi yokwenziwa ngokweendlela ezahlukeneyo zokulungiselela. I-Hydrogen (H2), i-nitrogen (N2), i-oksijini (O2), i-argon (A2), njl.;

Igesi ekhethekileyo

Igesi ekhethekileyo ibhekisa kwirhasi yeshishini esetyenziswa kwiindawo ezithile kwaye ineemfuno ezikhethekileyo zococeko, iintlobo ngeentlobo, kunye nezakhiwo. NgokuyintlokoSiH4, PH3, B2H6, A8H3,HCL, CF4,NH3, POCL3, SIH2CL2, SIHCL3,NH3, BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF6… kwaye nangokunjalo.

Iintlobo zeegesi zeSpicial

Iindidi zeegesi ezikhethekileyo: i-corrosive, ityhefu, isitsha, ukuxhasa ukutsha, i-inert, njl.
Iigesi ze-semiconductor ezisetyenziswa ngokuqhelekileyo zihlelwa ngolu hlobo lulandelayo:
(i) Eyonakeleyo/eyityhefu:I-HCl,BF3, WF6,HBr,SiH2Cl2,NH3,PH3,Cl2,BCl3…
(ii) Ukutsha: H2,CH4,SiH4,PH3,AsH3,SiH2Cl2,B2H6,CH2F2,CH3F,CO...
(iii) Inokutsha: O2,Cl2,N2O,NF3...
(iv) Inert: N2,CF4, C2F6,C4F8,SF6CO2,Ne,Kr, Yena…

Kwinkqubo yokwenziwa kwe-chip ye-semiconductor, malunga neentlobo ezingama-50 zeegesi ezikhethekileyo (ezibizwa ngokuba ziigesi ezikhethekileyo) zisetyenziselwa i-oxidation, i-diffusion, i-deposition, i-etching, i-injection, i-photolithography kunye nezinye iinkqubo, kunye namanyathelo enkqubo iyonke idlula amakhulu. Ngokomzekelo, i-PH3 kunye ne-ASH3 zisetyenziswa njenge-phosphorus kunye nemithombo ye-arsenic kwinkqubo yokufakelwa kwe-ion, i-F-based gases CF4, CHF3, SF6 kunye neegesi ze-halogen CI2, BCI3, HBr zisetyenziswa ngokuqhelekileyo kwinkqubo yokubhala, i-SiH4, NH3, N2O inkqubo yefilimu yokubeka, F2 / Kr / Ne, Kr / Ne kwinkqubo ye-photolithography.

Ukususela kule miba ingasentla, sinokuqonda ukuba iigesi ezininzi ze-semiconductor ziyingozi kumzimba womntu. Ngokukodwa, ezinye iigesi, ezifana ne-SiH4, ziyazitshisa. Ngethuba nje zivuza, ziya kusabela ngobudlova nge-oksijini emoyeni kwaye ziqale ukutshisa; kunye ne-ASH3 yityhefu kakhulu. Nakuphi na ukuvuza okuncinci kunokubangela ingozi kubomi babantu, ngoko ke iimfuno zokhuseleko loyilo lwenkqubo yokulawula ukusetyenziswa kweegesi ezikhethekileyo ziphezulu kakhulu.

I-semiconductors ifuna iigesi ezicocekileyo ukuba zibe "needigri ezintathu"

Ukucoceka kwegesi

Umxholo wokungcola kwegesi kwigesi udla ngokuchazwa njengepesenti yokucoceka kwegesi, njenge-99.9999%. Ukuthetha ngokubanzi, imfuno yococeko yeegesi ezikhethekileyo ze-elektroniki ifikelela kwi-5N-6N, kwaye iphinda ibonakaliswe ngumlinganiselo wevolumu yomxholo wokungcola emoyeni ppm (inxalenye ngesigidi), ppb (inxalenye yebhiliyoni nganye), kunye ne-ppt (inxalenye yetriliyoni nganye). Intsimi ye-semiconductor ye-elektroniki ineemfuno eziphezulu zokucoceka kunye nokuzinza komgangatho weegesi ezikhethekileyo, kwaye ukucoceka kweegesi ezikhethekileyo ze-elektroniki ngokuqhelekileyo kukhulu kune-6N.

Ukomisa

Isiqulatho samanzi okulandelela kwirhasi, okanye ubumanzi, budla ngokubonakaliswa kwindawo yombethe, njengendawo yombethe we-atmospheric -70℃.

Ucoceko

Inani lamasuntswana angcolisekileyo kwirhasi, amasuntswana anesuntswana lobungakanani beµm, libonakaliswa ngokuba mangaphi amasuntswana/M3. Umoya ocinezelweyo, ngokuqhelekileyo ubonakaliswa kwi-mg / m3 yeentsalela eziqinileyo ezingenakuphepheka, ezibandakanya umxholo weoli.