I-Hydrogen chlorideyigesi engenambala nevumba elinukayo. Isisombululo sayo samanzi sibizwa ngokuba yi-hydrochloric acid, eyaziwa ngokuba yi-hydrochloric acid. IHydrogen chloride inyibilika kakhulu emanzini. Kwi-0 ° C, umthamo we-1 wamanzi unokunyibilika malunga nama-500 umthamo we-hydrogen chloride.

Inezi mpawu zilandelayo kunye neempawu:

1. Ubunyulu obuphezulu

Ubunyulu bebakala lombaneihydrogen chlorideiphezulu kakhulu, ngokuqhelekileyo kwi-ppm okanye kwinqanaba elisezantsi, ukuqinisekisa ukuba akukho kungcola okungeniswa kwinkqubo yokuvelisa i-semiconductor.

2. Ukungazinzi

Igesi ye-inert yekhemikhali engaphenduliyo kunye nezinye izinto ezininzi, ezibaluleke kakhulu ukuthintela ukungcoliswa kwezinto kunye nezixhobo ze-semiconductor.

3. Ukuzinza okuphezulu

Ibakala le-elektronikiihydrogen chloridengokubanzi ine-chemistry ezinzileyo yokuqinisekisa ukusetyenzwa kwe-semiconductor ethembekileyo.

Kwinkqubo yesemiconductor, ezona zicelo ziphambili ze-electronic grade hydrogen chloride ziquka:

1. Ukucoca umphezulu kunye nokulungiswa

Njengesicoci somgangatho esisebenzayo, ibakala lombaneihydrogen chlorideisetyenziselwa ukususa i-oxides kunye nokungcola kwi-substrate surface ukuqinisekisa umgangatho kunye nokucoceka kwe-epitaxial layer okanye ifilimu.

2.Epitaxial ukukhula uncedo

Isetyenziswe njenge-agent yonyango yomgangatho ophezulu kwinkqubo ye-epitaxial, inceda ukuphucula umgangatho we-epitaxial layer, ukuphucula ukuhambelana kwe-lattice, kunye nokunciphisa ukubunjwa kweziphene ze-lattice.

3. Unyango lwangaphambili lweSubstrate

Ngaphambi kokulungiswa kwezixhobo ze-semiconductor, ibakala lombaneihydrogen chlorideingasetyenziselwa ukuphatha i-substrate surface ukwenza isiseko esizinzile sokuphucula ukunamathela phakathi kwe-epitaxial layer kunye ne-substrate.

4. I-arhente encedisayo yokubeka

Kwinkqubo ye-chemical vapor deposition (CVD) okanye i-vapor vapor deposition (PVD), i-electronic grade hydrogen chloride ingasetyenziswa njengendlela yokudlulisa isigaba segesi ukuthatha inxaxheba kwi-deposition reaction of semiconductor materials.

5. I-arhente yokudlulisa isigaba segesi

Njenge-agent ye-gas-phase transfer, ezinye ii-precursors ze-gaseous zingeniswa kwigumbi lokuphendula ukuze zincede ukulungelelanisa izinga lokubeka kunye nokufana kwezinto.

Ezi mpawu zenza ibakala lombaneihydrogen chloridei-agent ebalulekileyo yokucubungula kwi-teknoloji ye-semiconductor, enefuthe eliphambili ekusebenzeni kunye nokuthembeka kwesixhobo sokugqibela.

Ukongeza ekusebenziseni kwayo kwi-semiconductor processing, i-electron grade hydrogen chloride inokufumana iintlobo ezahlukeneyo zokusetyenziswa kwezinye iindawo, ezibandakanya: Ukulungiswa kwezinto ezicocekileyo eziphakamileyo, iiSeli zeFuel, ukukhula kwezinto ze-Semiconductor, i-Vapor Phase Lithography, uhlalutyo lwezinto eziphathekayo, uphando lweMichiza.

Ngokubanzi, ibakala le-elektronikiihydrogen chlorideyigesi eguquguqukayo, ecocekileyo enoluhlu olubanzi lwezicelo ngaphandle kokwenziwa kwe-semiconductor.