I-pitaxial (ukukhula)Ixutywe GAs

Kwicandelo le-semicondcuctor, igesi yayisetyenziselwa ukukhulisa impahla enye okanye engaphezulu yezinto ezizezixhobo ze-Vapor Vapor kwi-viedrate ekhethiweyo ebhalwe ngononophelo ibizwa ngokuba yigesi ye-epitaxial.

I-gestais ye-gestial esetyenziswayo ye-silicon esetyenziswayo ibandakanya i-dichlosilane, i-silicon tetrachloride kwayeiSilane. Isetyenziselwa ikakhulu i-epitachial yesilika, i-silicon oxeta ifakwe ifilimu, i-Asicon yesilika yesilivere yefilimu kunye nezinye iifoto ze-spital, njl njl.

I-Chemical Vapor Vapor (CVD) irhasi exubeneyo

I-CVD yindlela yokufaka izinto ezithile kunye neziqulatho ngokuphendula ngegesi yeShemikhali esebenzisa izixhobo eziguqukayo, okt, indlela yokwakha ifilimu esebenzisa igesi yamanqanaba emichiza. Kuxhomekeka kuhlobo lwefilimu ezenziweyo, i-Vapor Vapor yePhekami (CVD) igesi esetyenzisiweyo ikwahlukile.

DlalaIrhasi exubeneyo

Kwimveliso yezixhobo ze-semicondcuctor kunye neesekethe ezihlanganisiweyo, ukungcola okuthile zigcinwe kwizixhobo ze-semicondctor ukunika izixhobo zokuqengqeleka, njl. Njl.

Kakhulu kubandakanya i-Arsine, phosphine, phosphorus trifluoride, phosphorus pentafluoride, i-arnic trifluoride, i-arnic pentafluoride,I-boron trifluoride, Dingrane, njl.

Ngokwesiqhelo, umthombo ocoliweyo uxutywe negesi yothutho (njenge-argon kunye nenitrogen) kwiKhabhinethi yomthombo. Emva kokuxuba, ukuhamba kwegesi kuqhubeke ngokuqhubekayo kwiziko le-kwaqulus kunye nokujikeleza i-wafer, ifake i-dopants kumphezulu we-wafer, emva koko uqhubeke ne-silicon ukuba ivelise i-selicon.

I-etchingUmxube wegesi

Ukuphuma kwe-etching kwi-etke indawo yokulungisa (njengefilimu yesinyithi, ifilimu yesilika, njl njl) kwi-Subrest, njl njl.

Iindlela zokuphumelela zibandakanya i-ecalting yekhemikhali yekhemikhali kunye ne-eschical eyomileyo. Igesi esetyenziselwa i-eschic ye-eschic yekhemikhali ibizwa ngokuba yigesi.

Igesi ye-etching ihlala irhasi ye-fluoride (halide), njengeI-carbon ttrafluoride, i-nitrogen trifluoride, trifluoromethane, hexluoroerhane, perfluoropane, njl.