Igesi ye-China High Purity Carbon Tetrafluoride CF4 ethengiswa kakhulu yokuCoca iMishini yeSemiconductor

Inkcazo emfutshane:


Iinkcukacha zeMveliso

Iithegi zeMveliso

Sihlala senza umoya wethu "wokuvelisa izinto ezintsha, ukwenza izinto ezithile zibe zezona zilungileyo, inzuzo yokuthengisa yolawulo, amanqaku etyala atsala abathengi kwi-China High Purity Carbon Tetrafluoride CF4 Gas ethengiswa kakhulu kwi-Semiconductor Industry Etching, Samkela ngokufudumeleyo abahlobo abavela kuzo zonke iindlela zokuphila zemihla ngemihla ukufuna intsebenziswano kunye nokwakha ikamva eliqaqambileyo nelihle ngakumbi.
Sihlala senza umoya wethu "wokuvelisa izinto ezintsha, ukwenza izinto ezithile zibe semgangathweni ophezulu, inzuzo yokuthengisa yolawulo, amanqaku etyala atsala abathengiIgesi yefriji ye-CF4 yaseTshayina, Isilinda segesi, Siliqabane lakho elithembekileyo kwiimarike zamazwe ngamazwe ngeempahla ezisemgangathweni ophezulu. Iingenelo zethu kukuvelisa izinto ezintsha, ukuguquguquka kunye nokuthembeka okwakhiwa kwiminyaka engamashumi amabini edlulileyo. Sigxila ekuboneleleni ngenkonzo kubathengi bethu njengento ebalulekileyo ekuqiniseni ubudlelwane bethu bexesha elide. Ukufumaneka kwethu rhoqo kwezisombululo ezikumgangatho ophezulu kunye nenkonzo yethu ebalaseleyo yokuthengisa kwangaphambili kunye nenkonzo yasemva kokuthengisa kuqinisekisa ukhuphiswano oluqinileyo kwimarike yehlabathi jikelele.

Iiparameters zobugcisa

Inkcazo 99.999%
Ioksijini + iArgon ≤1ppm
I-nitrogen ≤4 ppm
Ukufuma (H2O) ≤3 ppm
HF ≤0.1 ppm
CO ≤0.1 ppm
I-CO2 ≤1 ppm
SF6 ≤1 ppm
IiHalocarbyne ≤1 ppm
Ukungcola okupheleleyo ≤10 ppm

I-Carbon tetrafluoride yi-halogenated hydrocarbon enefomyula yekhemikhali i-CF4. Ingathathwa njenge-halogenated hydrocarbon, i-halogenated methane, i-perfluorocarbon, okanye njenge-inorganic compound. I-Carbon tetrafluoride yigesi engenambala nengenavumba, ayinyibiliki emanzini, iyanyibilika kwi-benzene nakwi-chloroform. Izinzile phantsi kobushushu obuqhelekileyo kunye noxinzelelo, ziphephe ii-oxidants ezinamandla, izinto ezinokutsha okanye ezinokutsha. Igesi engatshayo, uxinzelelo lwangaphakathi lwesikhongozeli luya kwanda xa luvezwa kubushushu obuphezulu, kwaye kukho ingozi yokuqhekeka nokuqhuma. Izinzile ngokweekhemikhali kwaye ayitshayo. Yi-reagent yesinyithi ye-ammonia-sodium engamanzi kuphela enokusebenza kubushushu begumbi. I-Carbon tetrafluoride yigesi ebangela isiphumo se-greenhouse. Izinzile kakhulu, inokuhlala emoyeni ixesha elide, kwaye yigesi enamandla kakhulu ye-greenhouse. I-Carbon tetrafluoride isetyenziswa kwinkqubo yokugrumba i-plasma kwiisekethe ezahlukeneyo ezidibeneyo. Ikwasetyenziswa njengegesi yelaser, kwaye isetyenziswa kwiifriji, izinyibilikisi, ii-lubricants, izinto zokuthintela ubushushu, kunye nee-coolants kwi-infrared detectors. Yeyona gesi isetyenziswa kakhulu kwi-plasma etching kwishishini le-microelectronics. Ngumxube we-tetrafluoromethane high-purity gas kunye ne-tetrafluoromethane high-purity gas kunye ne-high-purity oxygen. Ingasetyenziswa kakhulu kwi-silicon, i-silicon dioxide, i-silicon nitride, kunye neglasi ye-phosphosilicate. Ukugcagca kwezinto zefilimu ezincinci ezifana ne-tungsten kunye ne-tungsten kukwasetyenziswa kakhulu ekucoceni umphezulu wezixhobo ze-elektroniki, ukuvelisa iiseli zelanga, iteknoloji ye-laser, ukufrijiza obushushu obuphantsi, ukuhlolwa kokuvuza, kunye ne-detergent kwimveliso yesekethe eprintiweyo. Isetyenziswa njenge-refrigerant yobushushu obuphantsi kunye neteknoloji ye-plasma etching eyomileyo kwiisekethe ezidibeneyo. Amanyathelo okhuseleko okugcina: Gcina kwindawo yokugcina igesi epholileyo, enomoya ongatshiyo. Gcina kude nomlilo kunye nemithombo yobushushu. Ubushushu bokugcina akufuneki budlule kwi-30°C. Ifanele igcinwe ngokwahlukileyo kwizinto ezitshayo (ezinokutsha) kunye nezinto ezitshisayo, kwaye kuthintelwe ukugcinwa okuxutyiweyo. Indawo yokugcina kufuneka ixhotyiswe ngezixhobo zonyango olungxamisekileyo oluvuzayo.

Isicelo:

① Isiqandisi:

I-Tetrafluoromethane ngamanye amaxesha isetyenziswa njengefriji eshushu kakhulu.

  fdrgr uGreg

② Ukukrola:

Isetyenziswa kwi-electronics microfabrication yodwa okanye xa idityaniswe ne-oxygen njenge-plasma etchant ye-silicon, i-silicon dioxide, kunye ne-silicon nitride.

i-dsgre i-rgg

Iphakheji eqhelekileyo:

Imveliso I-Carbon Tetrafluoride CF4
Ubungakanani bephakheji Isilinda se-40Ltr Isilinda se-50Ltr  
Ukuzalisa Ubunzima Obupheleleyo/Isilinda Iikhilogram ezingama-30 Iikhilogram ezingama-38  
Ubungakanani obulayishwe kwisikhongozeli se-20' IiCyls ezingama-250 IiCyls ezingama-250
Ubunzima obupheleleyo Iitoni ezi-7.5 Iitoni eziyi-9.5
Ubunzima beSilinda Iikhilogram ezingama-50 Iikhilogram ezingama-55
Ivalvu I-CGA 580

Inzuzo:

①Ubumsulwa obuphezulu, indawo yamva nje;

②Umenzi wesatifikethi se-ISO;

③Ukuhanjiswa okukhawulezayo;

④ Inkqubo yohlalutyo olukwi-intanethi lokulawula umgangatho kwinyathelo ngalinye;

⑤Imfuneko ephezulu kunye nenkqubo ecokisekileyo yokuphatha isilinda ngaphambi kokuzalisa;Sihlala senza umoya wethu "wokuvelisa izinto ezintsha, ukwenza izinto ezithile zibe zezona zilungileyo, inzuzo yokuthengisa yolawulo, amanqaku etyala atsala abathengi kwi-China High Purity Carbon Tetrafluoride CF4 Gas ethengiswa kakhulu kwi-Semiconductor Industry Etching, Samkela ngokufudumeleyo abahlobo abavela kuzo zonke iindlela zokuphila zemihla ngemihla ukufuna intsebenziswano kunye nokwakha ikamva eliqaqambileyo nelihle ngakumbi.
Ithengiswa kakhuluIgesi yefriji ye-CF4 yaseTshayina, Isilinda segesi, Siliqabane lakho elithembekileyo kwiimarike zamazwe ngamazwe ngeempahla ezisemgangathweni ophezulu. Iingenelo zethu kukuvelisa izinto ezintsha, ukuguquguquka kunye nokuthembeka okwakhiwa kwiminyaka engamashumi amabini edlulileyo. Sigxila ekuboneleleni ngenkonzo kubathengi bethu njengento ebalulekileyo ekuqiniseni ubudlelwane bethu bexesha elide. Ukufumaneka kwethu rhoqo kwezisombululo ezikumgangatho ophezulu kunye nenkonzo yethu ebalaseleyo yokuthengisa kwangaphambili kunye nenkonzo yasemva kokuthengisa kuqinisekisa ukhuphiswano oluqinileyo kwimarike yehlabathi jikelele.


  • Ngaphambili:
  • Okulandelayo:

  • Bhala umyalezo wakho apha uze uwuthumele kuthi