UkuThengisa okuHlanganayo i-China Preby Carbon Tetrafluoride CF4 igesi ye-semicondcucring

Sisebenzisa rhoqo umoya wethu wento yokutya, ukwenza inkqubela phambili ekuthengiseni, intengo yokuthengisa i-CHECON CHECHON TF4 ye-SEMONGON CHECHUOR CHECHOREY NOBUCHULE BOKUKHANYA NOKUKHONZA IXESHA LOKUGQIBELA NOBUCHULE.
Sisebenzisa rhoqo umoya wethu wexesha elininzi, ukwenza inkqubela phambili ekwenzeni inkqubela phambili yokutya, isibonelelo sokuthengisa ulawulo, amanqaku etyala okutsala abathengiI-China CF4 igesi yefriji, Isilinda igesi, Siliqabane lakho elithembekileyo kwiimarike zamanye amazwe kunye neempahla ezisemgangathweni. Izibonelelo zethu zizinto ezintsha, bhetyebhetye kunye nokuthembeka okwakhiwe kwiminyaka engamashumi amabini idlulileyo. Sigxila ekuboneleleni ngeenkonzo zabathengi bethu njengeyona nto iphambili ekomelezeni ubudlelwane bethu bexesha elide. Ukuqhubeka kwethu kwezisombululo zebakala eliphezulu ngokudibeneyo kunye nenkonzo yethu yentengiso yangaphambi kokuthengisa kunye nentengiso yasemva kokuthengisa kuqinisekisa ukhuphiswano olunzulu kwimarike yehlabathi.

Iiparamitha zobugcisa

I-Carbon Tetrafluoride yi-Hydrocarbon ehamba nge-Hydrocarbon enefomula yekhemikhali ye-chemic4. Kungathathwa njenge-hydrocarbon ye-hydrocarbon, i-hagodied methane, i-perfluorocarbon, okanye njengendawo ye-Inorganic. I-Carbon Tetrafluoride yirhasi engenamibala kunye ne-odolf engenazilwanyana, i-insuble emanzini, inyibilike e-Bedzene kunye ne-chloroform. Izinzile phantsi kobushushu obuqhelekileyo kunye noxinzelelo, zithintele ii-onudants ezizomeleleyo, izixhobo ezinokutsha okanye ezinokutsha. Igesi engeyiyo irhasi, uxinzelelo lwangaphakathi lwesikhongozeli luya kunyuka xa liboniswe kubushushu obuphezulu, kwaye kukho ingozi yokuqhekeka kwaye kuqhume. Kuzinza kakuhle kwaye kungavutha. Kuphela kuphela i-Ammonia-sodium yentsimbi isebenza kubushushu begumbi. I-Carbon Tetrafluoride yirhasi ebangela ifuthe lezityalo. Inokuzinza kakhulu, inokuhlala kwimozulu yexesha elide, kwaye yirhasi eluhlaza enkulu. I-Carbon Tetrafluoride isetyenziswa kwinkqubo ye-plasma etching yesekethe eyahlukeneyo. Ikwasetyenziswa njengegesi yase-laser, kwaye isetyenziswa kwiifriji zeqondo lobushushu, izinyibilikisi, izixhobo zokuthambisa, kunye nokuphola kwezixhobo ze-infrared. Yeyona irhasi ye-plasma esebenzisa igesi ye-radelics kwishishini le-microelectronic. Ngumxube we-tetrafluodhane-gesi gesi yegesi kunye ne-tetrafluoromethane igesi kunye neoksijini ephezulu. Ingasetyenziswa ngokubanzi kwiSilicon, i-Silicon Dioxeide, Silicon Nitride, kunye ne-phosphosilicilicate iglasi. Ukuthathwa kwezinto ezinqabileyo ezifana ne-tungsten kwaye i-tungsten isetyenziswa ngokubanzi ekucoceni izixhobo ze-elektroniki, i-Solar yeSeli, itekhnoloji ye-Solar, iteknoloji yokuKhangela kweqondo lobushushu, kunye ne-orgent kwimveliso yesekethe eprintiweyo. Isetyenziswe njengeranti yeqondo lobushushu kunye ne-plasma yome itekhnoloji ye-etching ye-etching yesekethe. Amanyathelo okhuseleko lokugcina: Ivenkile kwindawo epholileyo, epholileyo engafunekiyo yegesi. Hlala kude nomlilo nobushushu. Iqondo lokugcina le-GORG alifanele lidlule kwi-30 ° C. Ifanele igcinwe ngokwahlukeneyo ukusuka ngokulula (enokutsha) i-accials kunye nee-oxidants, kwaye zithintele ukugcinwa okuxubeneyo. Indawo yokugcina kufuneka ixhotywe ngezixhobo zokunyanga ezingxamisekileyo.

Isicelo:

① ifriji:

I-Tetrafluoromethane ngamanye amaxesha isetyenziswa njengefriji yeqondo lobushushu.

I-ETHIT:

Isetyenziselwa ukwena i-Microficriction yedwa okanye ngokudibeneyo ngeoksijini njenge-plasma i-esiricon, i-silicon dioksi, kunye nesilicon nitride.

Iphakheji eqhelekileyo:

Inzuzo:

Ukucoceka ukucoceka, indawo yamva;

Umvelisi wesitifiketi se-②iso;

Ukuhanjiswa;

Inkqubo yohlalutyo lwe-④on-line kulawulo oluphawuleleyo kuwo onke amanyathelo;

Imfuneko ye-⑤highy kunye nenkqubo yokulinganisa yokuphatha isilinda ngaphambi kokugcwalisa;Sisebenzisa rhoqo umoya wethu wento yokutya, ukwenza inkqubela phambili ekuthengiseni, intengo yokuthengisa i-CHECON CHECHON TF4 ye-SEMONGON CHECHUOR CHECHOREY NOBUCHULE BOKUKHANYA NOKUKHONZA IXESHA LOKUGQIBELA NOBUCHULE.
Ukuthengisa okushushuI-China CF4 igesi yefriji, Isilinda igesi, Siliqabane lakho elithembekileyo kwiimarike zamanye amazwe kunye neempahla ezisemgangathweni. Izibonelelo zethu zizinto ezintsha, bhetyebhetye kunye nokuthembeka okwakhiwe kwiminyaka engamashumi amabini idlulileyo. Sigxila ekuboneleleni ngeenkonzo zabathengi bethu njengeyona nto iphambili ekomelezeni ubudlelwane bethu bexesha elide. Ukuqhubeka kwethu kwezisombululo zebakala eliphezulu ngokudibeneyo kunye nenkonzo yethu yentengiso yangaphambi kokuthengisa kunye nentengiso yasemva kokuthengisa kuqinisekisa ukhuphiswano olunzulu kwimarike yehlabathi.