I-2010 EXELWE I-ETCHIng igesi 99.999% ye-CFIT CF4 TETROFLUTECYHANA CF4 igesi

Inkcazo emfutshane:


Iinkcukacha zemveliso

Iimpawu zeMveliso

Ishishini lethu lijolise ekusebenzeni ngokuthembekileyo, lisebenza kuwo onke amathemba ethu, kunye nokusebenza kwitekhnoloji entsha kunye nomatshini omtsha igesi ye-TF4, sibamkeli ngentliziyo iphela se-CF4 tity igesi yonke i-CF4 tity the Nonke afumane iNtsebenziswano nathi!
Ishishini lethu lijolise ekusebenzeni ngokuthembekileyo, ndisebenzela onke amathemba ethu, kunye nokusebenza kwitekhnoloji entsha kunye nomatshini omtsha rhoqoI-China CF4 igesi ye-China CF4 kunye ne-carbon titrafluoride yegesi, Ukoneliseka komthengi kuhlala kuhlala kuyimfuno yethu, ukudala ixabiso kubathengi kusoloko kusenziwa umsebenzi wethu, ixesha elide lobuhlobo lweshishini yinto esiyenzayo. Siliqabane elithembekileyo elithembekileyo kwimeko yakho eTshayina. Ewe, ezinye iinkonzo, njengokubonisana, zinokuhanjiswa.

Iiparamitha zobugcisa

Ukucaciswa I-99.999%
Ioksijini + Argon ≤1ppm
Initrogen ≤4 PPM
Ukufuma (h2o) ≤3 PPM
HF ≤0.1 PPM
CO ≤0.1 PPM
I-co2 ≤1 PPM
Sf6 ≤1 PPM
I-Halocarbynes ≤1 PPM
Ukungcola ngokupheleleyo ≤10 i-PPM

I-Carbon Tetrafluoride yi-Hydrocarbon ehamba nge-Hydrocarbon enefomula yekhemikhali ye-chemic4. Kungathathwa njenge-hydrocarbon ye-hydrocarbon, i-hagodied methane, i-perfluorocarbon, okanye njengendawo ye-Inorganic. I-Carbon Tetrafluoride yirhasi engenamibala kunye ne-odolf engenazilwanyana, i-insuble emanzini, inyibilike e-Bedzene kunye ne-chloroform. Izinzile phantsi kobushushu obuqhelekileyo kunye noxinzelelo, zithintele ii-onudants ezizomeleleyo, izixhobo ezinokutsha okanye ezinokutsha. Igesi engeyiyo irhasi, uxinzelelo lwangaphakathi lwesikhongozeli luya kunyuka xa liboniswe kubushushu obuphezulu, kwaye kukho ingozi yokuqhekeka kwaye kuqhume. Kuzinza kakuhle kwaye kungavutha. Kuphela kuphela i-Ammonia-sodium yentsimbi isebenza kubushushu begumbi. I-Carbon Tetrafluoride yirhasi ebangela ifuthe lezityalo. Inokuzinza kakhulu, inokuhlala kwimozulu yexesha elide, kwaye yirhasi eluhlaza enkulu. I-Carbon Tetrafluoride isetyenziswa kwinkqubo ye-plasma etching yesekethe eyahlukeneyo. Ikwasetyenziswa njengegesi yase-laser, kwaye isetyenziswa kwiifriji zeqondo lobushushu, izinyibilikisi, izixhobo zokuthambisa, kunye nokuphola kwezixhobo ze-infrared. Yeyona irhasi ye-plasma esebenzisa igesi ye-radelics kwishishini le-microelectronic. Ngumxube we-tetrafluodhane-gesi gesi yegesi kunye ne-tetrafluoromethane igesi kunye neoksijini ephezulu. Ingasetyenziswa ngokubanzi kwiSilicon, i-Silicon Dioxeide, Silicon Nitride, kunye ne-phosphosilicilicate iglasi. Ukuthathwa kwezinto ezinqabileyo ezifana ne-tungsten kwaye i-tungsten isetyenziswa ngokubanzi ekucoceni izixhobo ze-elektroniki, i-Solar yeSeli, itekhnoloji ye-Solar, iteknoloji yokuKhangela kweqondo lobushushu, kunye ne-orgent kwimveliso yesekethe eprintiweyo. Isetyenziswe njengeranti yeqondo lobushushu kunye ne-plasma yome itekhnoloji ye-etching ye-etching yesekethe. Amanyathelo okhuseleko lokugcina: Ivenkile kwindawo epholileyo, epholileyo engafunekiyo yegesi. Hlala kude nomlilo nobushushu. Iqondo lokugcina le-GORG alifanele lidlule kwi-30 ° C. Ifanele igcinwe ngokwahlukeneyo ukusuka ngokulula (enokutsha) i-accials kunye nee-oxidants, kwaye zithintele ukugcinwa okuxubeneyo. Indawo yokugcina kufuneka ixhotywe ngezixhobo zokunyanga ezingxamisekileyo.

Isicelo:

① ifriji:

I-Tetrafluoromethane ngamanye amaxesha isetyenziswa njengefriji yeqondo lobushushu.

  fdrgr greg

I-ETHIT:

Isetyenziselwa ukwena i-Microficriction yedwa okanye ngokudibeneyo ngeoksijini njenge-plasma i-esiricon, i-silicon dioksi, kunye nesilicon nitride.

I-DSGRE i-rgg

Iphakheji eqhelekileyo:

Imveliso I-Carbon Tetrafluoride CF4
Ubungakanani bephakeji I-40tr cylinder I-50ltr cylinder  
Ukuzalisa ubunzima bomnatha / cyl I-30kgs 38kgs  
I-Qty ilayishwe kwi-20'Container Ii-cyls ezingama-250 Ii-cyls ezingama-250
Iyonke ubunzima 7.5 Iitoni Iitoni ezi-9.5
Isilinda ubunzima I-50kgs I-55kgs
Ivalve I-CGA 580

Inzuzo:

Ukucoceka ukucoceka, indawo yamva;

Umvelisi wesitifiketi se-②iso;

Ukuhanjiswa;

Inkqubo yohlalutyo lwe-④on-line kulawulo oluphawuleleyo kuwo onke amanyathelo;

Imfuneko ye-⑤highy kunye nenkqubo yokulinganisa yokuphatha isilinda ngaphambi kokugcwalisa;Ishishini lethu lijolise ekusebenzeni ngokuthembekileyo, lisebenza kuwo onke amathemba ethu, kunye nokusebenza kwitekhnoloji entsha kunye nomatshini omtsha igesi ye-TF4, sibamkeli ngentliziyo iphela se-CF4 tity igesi yonke i-CF4 tity the Nonke afumane iNtsebenziswano nathi!
Umgangatho olungileyoI-China CF4 igesi ye-China CF4 kunye ne-carbon titrafluoride yegesi, Ukoneliseka komthengi kuhlala kuhlala kuyimfuno yethu, ukudala ixabiso kubathengi kusoloko kusenziwa umsebenzi wethu, ixesha elide lobuhlobo lweshishini yinto esiyenzayo. Siliqabane elithembekileyo elithembekileyo kwimeko yakho eTshayina. Ewe, ezinye iinkonzo, njengokubonisana, zinokuhanjiswa.


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